The AeroBar MP 5635 Ionizing Bar from Simco, with an active length of 500 mm, is specifically designed for use in extremely clean environments such as semiconductor manufacturing. This device utilizes advanced modulated pulse technology to generate high-frequency sine waves with pulse modulation, allowing for effective and uniform ionization across its entire length. The bar is ideal for applications where low field voltages and minimal contamination are critical, including the assembly of advanced electronics and nanotechnology.
With a width of 34 mm, a height of 78 mm, and a total length of 600 mm, the ionizing bar offers outstanding proximity capabilities of up to 150 mm distance to sensitive components. The AeroBar MP 5635 meets the stringent purity standards of ISO 14644 Class 1 and features high-purity silicon emitter tips, which are arranged in a 50 mm grid. These emitter tips are interchangeable and ensure compatibility with sensitive processes.
For optimal adjustment of the ion balance, which is +/- 20 V, users can manually fine-tune the control parameters on the device or through user-friendly software. Additionally, the bar supports air assistance for improved ion distribution and features automatic balancing for precise static neutralization. Alarm notifications inform about the operational status, and installation is simple by connecting to a 24 V DC power source.
The AeroBar MP 5635 is compatible with all wafer technology nodes down to 22 nm and offers a robust solution for demanding industrial applications.
Details
- ISO according to 14644-1
ISO according to 14644-1
- 1
- Active length
Active length
- 500
- Emitter spacing
Emitter spacing
- 50 mm
- Emitters
Emitters
- 11
- Ion balance +/-
Ion balance +/-
- 20 V
- Working voltage
Working voltage
- 24 V/DC
- Height [mm]
Height [mm]
- 78 mm
- Length [mm]
Length [mm]
- 600 mm
- Width [mm]
Width [mm]
- 34 mm
- Ambient temperature
Ambient temperature
- 15 - 35 °C
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