AeroBar MP 5635 Replacement Emitters
The AeroBar MP 5635 replacement emitters are specifically designed to efficiently eliminate electrostatic charges in semiconductor production and other critical cleanroom processes. They utilize a high-frequency sinusoidal wave with modulated pulses to achieve a very high ion output. This allows placement in close proximity to wafers, meeting the requirements of the extended ISO 1 class.
Installation is easy by plugging into a 24 V DC power source. Additionally, optional compressed air support is available. Users can fine-tune the control parameters directly on the device or via user-friendly software to achieve optimal results in terms of balance, voltage fluctuation, and discharge time.
Technical Specifications:
- Compatible with wafer technologies including 22 nm and below
- Uniform balance
- Placement possible at a distance of 150 mm from wafer or mask
- Emitter tips made of extremely pure silicon
- Alarm output signal for connection to machine control
- Dimensions: 78 x 34 x 450 - 1600 mm
Please note that this product is not eligible for exchange.
Item number: 7500.AB-MP.E
Product type: Accessory
Details