AeroBar MP 5635 Power Supply
The AeroBar MP 5635 is an advanced ionizing bar, specifically designed for use in cleanroom environments such as semiconductor production. It features fast discharge times, minimal voltage fluctuations, and precise balance. The application of MP technology allows for efficient ion generation through a high-frequency sinusoidal wave with modulated pulses. This permits close positioning to the wafer, supported by extremely clean silicon emitter tips that meet the stringent requirements of ISO Class 1.
The product's power supply, equipped with an indicator light and a connection socket, allows for easy installation by directly plugging into a 24 V DC power source. Optional air support and user-friendly software offer additional customization options. An alarm output supports integration into machine controls or monitoring systems.
Technical Specifications:
- Compatibility: Wafer technology ≤ 22 nm
- Balance: Uniform across the entire length
- Placement: 150 mm distance to wafer/mask
- Technology: Modulated pulses, ISO Class 1
- Air support: Optional
- Software: Customizable, user-friendly
- Alarm: Output signal available
- Emitter tips: Silicon, ISO Class 1
- Power supply: 24 Volt DC
- Dimensions: 78 x 34 x 450 - 1600 mm
- Cable: 2.5 m length
- Item number: 7500.AB-MP.T
- Product type: Accessory
Details
- Cable length
Cable length
- 2.5 m